THE CHARACTERIZATION OF VIA-FILLING TECHNOLOGY WITH ELECTROLESS PLATING METHOD

被引:17
作者
HARADA, Y
FUSHIMI, K
MADOKORO, S
SAWAI, H
USHIO, S
机构
关键词
D O I
10.1149/1.2108421
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:2428 / 2430
页数:3
相关论文
共 5 条
[1]  
ANTONY TR, 1981, J APPL PHYS, V52, P5340
[2]  
BRENNER A, 1954, MET FINISH, V52, P61
[3]  
BRENNER A, 1954, MET FINISH, V52, P68
[4]  
MOGAMI T, 1985, JUN P IEEE VLSI MULT, P17
[5]  
OAKLEY RE, 1984, JUN P IEEE VLSI MULT, P23