ELECTRON SWARM PARAMETERS IN SIH4-RARE GAS-MIXTURES AND COLLISION CROSS-SECTIONS FOR MONOSILANE MOLECULES

Previously measured drift velocity and longitudinal diffusion coefficient in SiH4-Ar mixtures were re-analyzed, and the new vibrational excitation cross sections for monosilane molecules were obtained. Not only were the new cross sections consistent with swarm parameters, but also the ratio of their magnitudes at the resonance peak agreed with recent measurements of the electron beam experiment. Having known the vibrational excitation cross sections, the analysis of the primary ionization coefficient measured in SiH4-Kr mixtures led to a consistent inelastic cross section, which possibly corresponds to the total cross section for neutral dissociations for the molecule. It was confirmed that the derived set of the cross sections also gave good agreement with the electron swarm parameters measured in pure monosilane gas.