OPTICAL-ABSORPTION AND ELECTRICAL-CONDUCTIVITY OF SIC FILMS PRODUCED BY ION-IMPLANTATION

被引:19
作者
ROTHEMUND, W [1 ]
FRITZSCHE, CR [1 ]
机构
[1] FRAUNHOFER GESELL, INST ANGEW FESTKORPERPHYS, D-78 FREIBURG, WEST GERMANY
关键词
D O I
10.1149/1.2401864
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:586 / 588
页数:3
相关论文
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