THE EFFECTS OF DEPOSITION PARAMETERS ON THE OPTICAL-PERFORMANCE OF THIN DIELECTRIC FILMS

被引：2

作者：

ALDOURI, AAJ ^{[1
]}

HEAVENS, OS ^{[1
]}

机构：

[1] UNIV YORK,DEPT PHYS,YORK YO1 5DD,N YORKSHIRE,ENGLAND

来源：

VACUUM | 1986年 / 36卷 / 04期

关键词：

D O I：

10.1016/0042-207X(86)90001-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：207 / 212

页数：6

共 19 条

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