VLSI TECHNOLOGY AND DIELECTRIC FILM SCIENCE

被引：5
作者：
FEIGL, FJ
机构：
来源：
PHYSICS TODAY | 1986年 / 39卷 / 10期
关键词：
D O I：
10.1063/1.881068
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
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页码：47 / 54
页数：8
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