ACTIVATION AND REDISTRIBUTION OF PHOSPHORUS IN POLYSILICON BY RAPID THERMAL-PROCESSING

被引：0
|
作者：
CHOW, R [1 ]
POWELL, RA [1 ]
机构：
[1] VARIAN ASSOCIATES,PALO ALTO,CA 94303
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1984年 / 131卷 / 08期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C320 / C320
页数：1
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