SOI BY CVD - EPITAXIAL LATERAL OVERGROWTH (ELO) PROCESS - REVIEW

被引：92
作者：
JASTRZEBSKI, L
机构：
来源：
JOURNAL OF CRYSTAL GROWTH | 1983年 / 63卷 / 03期
关键词：
D O I：
10.1016/0022-0248(83)90164-1
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
引用
收藏
页码：493 / 526
页数：34
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