ELECTRON-BEAM MICRORECORDER WITH FIELD-EMISSION GUN

被引:0
作者
SPEIDEL, R
BENNER, G
机构
来源
OPTIK | 1986年 / 73卷 / 04期
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中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
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页码:138 / 145
页数:8
相关论文
共 14 条
[1]  
CREWE AV, 1978, OPTIK, V52, P337
[2]  
EUPPER M, 1977, THESIS TUBINGEN
[3]  
GOTO E, 1978, 8 P INT C EL ION BEA, P135
[4]  
GRESCHNER J, 1976, OPTIK, V45, P281
[5]  
KELLY J, 1981, HEWLETTPACKARD J MAY, P14
[6]  
KERN D, 1978, OPTIK, V52, P61
[7]  
KUO HP, 1976, THESIS CORNELL U
[8]   ADVANCED DEFLECTION CONCEPT FOR LARGE AREA, HIGH-RESOLUTION E-BEAM LITHOGRAPHY [J].
PFEIFFER, HC ;
LANGNER, GO .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04) :1058-1063
[9]  
Rao N. V., 1965, Z ANGEW PHYS, V19, P352
[10]  
SPEIDEL R, 1985, OPTIK, V71, P167