共 14 条
[1]
CREWE AV, 1978, OPTIK, V52, P337
[2]
EUPPER M, 1977, THESIS TUBINGEN
[3]
GOTO E, 1978, 8 P INT C EL ION BEA, P135
[4]
GRESCHNER J, 1976, OPTIK, V45, P281
[5]
KELLY J, 1981, HEWLETTPACKARD J MAY, P14
[6]
KERN D, 1978, OPTIK, V52, P61
[7]
KUO HP, 1976, THESIS CORNELL U
[8]
ADVANCED DEFLECTION CONCEPT FOR LARGE AREA, HIGH-RESOLUTION E-BEAM LITHOGRAPHY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1981, 19 (04)
:1058-1063
[9]
Rao N. V., 1965, Z ANGEW PHYS, V19, P352
[10]
SPEIDEL R, 1985, OPTIK, V71, P167