CHARACTERIZATION OF AS-PREPARED AND ANNEALED HYDROGENATED CARBON-FILMS

被引：40

作者：

GONZALEZHERNANDEZ, J ^{[1
]}

CHAO, BS ^{[1
]}

PAWLIK, DA ^{[1
]}

机构：

[1] ENERGY CONVERS DEVICES INC, TROY, MI 48084 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.575938

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2332 / 2338

页数：7

共 18 条

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