THE INFLUENCE OF IRON ON PROPERTIES OF DEPOSITED NI-CR-SI FILM RESISTORS

被引：1
作者：
CHANG, FB
KANG, LN
机构：
[1] Department of Electronic Engineering, Xi'an Jiaotong University, Xi'an
来源：
THIN SOLID FILMS | 1990年 / 185卷 / 02期
关键词：
D O I：
10.1016/0040-6090(90)90097-W
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The correlations between the composition of NiCrSiFe film resistors and their electrical properties, which are electrical resistivity, temperature coefficient of resistance and current noise, are studied in this paper. In the experiments the NiCrSi ration was kept constant, while the iron content was changed. The compositions were deposited on crystalline glass with a zigzag-shaped mask which had been made by photolithography at a definite deposited rate. A new kind of NiCrSiFe resistor was obtained; the maximum resistivity is 334 × 10-8 ωm, the temperature coefficient of resistivity between ±53 × 10-6 K-1 and the current noise -34 dB. © 1990.
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页码：341 / 346
页数：6
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