ION-BOMBARDMENT OF RESISTS

被引：53
|
作者：
ADESIDA, I [1 ]
机构：
[1] CORNELL UNIV,NATL RES & RESOURCE FACIL SUBMICRON STRUCT,ITHACA,NY 14853
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期
关键词：
The author wishes to acknowledge fruitful discussions with Professors E.D. Wolf and C.A. Lee; and with Dr. L. Karapiperis. The technical contributions of R. Tiberio; B; Whitehead; M; Skvarla; and C. Anderson are gratefully acknowledged. Thanks are also due to H. Rettig for the preparation of this manuscript. This work was supported in part by a grant from the International Business Machines Corporation; and by the National Science Foundation through grant no. 77-09688 to the National Research and Resource Facility for Submicron Structures;
D O I：
10.1016/0167-5087(83)90785-8
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
34
引用
收藏
页码：79 / 86
页数：8
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