AUTOMATIC POSITIONING OF DEVICE ELECTRODES USING SCANNING ELECTRON MICROSCOPE

被引：17

作者：

WELLS, OC

EVERHART, TE

MATTA, RK

机构：

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1965年 / ED12卷 / 10期

关键词：

D O I：

10.1109/T-ED.1965.15607

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：556 / &

共 38 条

[1]

BAKISH R, 1962, INTRODUCTION ELEC ED, P374

[2]

Broers A, 1965, MICROELECTRON RELIAB, V4, P103

[3]

BROERS AN, 1965, THESIS CAMBRIDGE U

[4] FORMATION OF THIN FILM CIRCUITS USING PREFERENTIAL NUCLEATION [J].

CASWELL, HL ;

BUDO, Y .

SOLID-STATE ELECTRONICS, 1965, 8 (05) :479-&

[5]

CLARK GL, 1961, ENCYCLOPEDIA MICR ED, P241

[6] SIMULTANEOUS OBSERVATION OF DIFFUSION-INDUCED DISLOCATION SLIP PATTERNS IN SI WITH ELECTRON BEAM SCANNING + OPTICAL MEANS [J].

CZAJA, W ;

WHEATLEY, GH .

JOURNAL OF APPLIED PHYSICS, 1964, 35 (09) :2782-&

[7] OBSERVATIONS OF INDIVIDUAL DISLOCATIONS AND OXYGEN PRECIPITATES IN SILICON WITH A SCANNING ELECTRON BEAM METHOD [J].

CZAJA, W ;

PATEL, JR .

JOURNAL OF APPLIED PHYSICS, 1965, 36 (04) :1476-&

[8]

Evekhart T.E., 1959, J ELECT CONTROL, V7, P97, DOI 10.1080/00207215908937191

[9] NOVEL METHOD OF SEMICONDUCTOR DEVICE MEASUREMENTS [J].

EVERHART, TE ;

MATTA, RK ;

WELLS, OC .

PROCEEDINGS OF THE IEEE, 1964, 52 (12) :1642-&

[10] EVALUATION OF PASSIVATED INTEGRATED CIRCUITS USING THE SCANNING ELECTRON MICROSCOPE [J].

EVERHART, TE ;

WELLS, OC ;

MATTA, RK .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (08) :929-936

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