A NEW SELF-ALIGNED GAAS-FET WITH A MO/WSIX T-GATE

被引:6
|
作者
SUZUKI, M
KURIYAMA, Y
HIRAYAMA, M
机构
关键词
D O I
10.1109/EDL.1985.26223
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:542 / 544
页数:3
相关论文
共 50 条
  • [31] ION-IMPLANTED SELF-ALIGNED MO GATE MOSFET
    SAITO, K
    ELECTRONICS & COMMUNICATIONS IN JAPAN, 1977, 60 (09): : 85 - 92
  • [32] WSiN self-aligned gate GaAs-MESFET technology
    Yamasaki, Kimiyoshi
    Hyuga, Fumiaki
    Tokumitsu, Masami
    Yamane, Yasuro
    NTT R and D, 1996, 45 (01): : 47 - 52
  • [33] MONOLITHIC DUAL-GATE GAAS-FET AMPLIFIER
    KUMAR, M
    TAYLOR, GC
    HUANG, HC
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1981, 28 (02) : 197 - 204
  • [34] NEW APPROACHES IN GAAS-FET TECHNOLOGY
    MARSHALL, S
    SOLID STATE TECHNOLOGY, 1979, 22 (09) : 72 - 72
  • [35] Self-aligned ALD AlOx T-gate insulator for gate leakage current suppression in SiNx-passivated AlGaN/GaN HEMTs
    Meyer, David J.
    Bass, Robert
    Katzer, D. Scott
    Deen, David A.
    Binari, Steven C.
    Daniels, Kevin M.
    Eddy, Charles R., Jr.
    SOLID-STATE ELECTRONICS, 2010, 54 (10) : 1098 - 1104
  • [36] VERTICAL FET WITH SELF-ALIGNED ION-IMPLANTED SOURCE AND GATE REGIONS
    OZAWA, O
    IWASAKI, H
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (01) : 56 - 57
  • [37] NOVEL HIGH-PERFORMANCE SELF-ALIGNED 0.15 MICRON LONG T-GATE ALINAS-GAINAS HEMTS
    MISHRA, UK
    BROWN, AS
    JELLOIAN, LM
    THOMPSON, M
    NGUYEN, LD
    ROSENBAUM, SE
    1989 INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST, 1989, : 101 - 104
  • [38] Self-aligned T-gate InPHEMT realisation through double delta doping and a non-annealed ohmic process
    Moran, DAJ
    Boyd, E
    Elgaid, K
    McEwan, F
    McLelland, H
    Stanley, CR
    Thayne, IG
    MICROELECTRONIC ENGINEERING, 2004, 73-4 : 814 - 817
  • [39] THRESHOLD VOLTAGE ADJUSTABLE PROCESS FOR SELF-ALIGNED GATE GAAS JFET
    TIKU, SK
    ELECTRONICS LETTERS, 1985, 21 (23) : 1091 - 1093
  • [40] GAAS-MESFETS WITH A LAB6 SELF-ALIGNED GATE
    TAKATANI, S
    UCHIDA, Y
    YOKOTSUKA, T
    NAKASHIMA, H
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (11) : 2375 - 2376