THE EFFECT OF BOUNDARY-CONDITIONS IN ION MIXING OF MULTILAYERED NI-SI SAMPLES

被引：10
作者：
HEWETT, CA
LAU, SS
SUNI, I
POKER, DB
机构：
[1] TECH RES CTR FINLAND,SEMICOND LAB,SF-02150 ESPOO 15,FINLAND
[2] OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37830
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 7-8卷 / MAR期
关键词：
D O I：
10.1016/0168-583X(85)90440-9
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：597 / 600
页数：4
相关论文
共 12 条
[1]  
HUNG LS, 1983, APPL PHYS LETT, V43, P831
[2]   CHANNELING STUDIES OF RADIATION-DAMAGE IN METAL-SILICIDES [J].
ISHIWARA, H ;
HIKOSAKA, K ;
FURUKAWA, S .
APPLIED PHYSICS LETTERS, 1978, 32 (01) :23-24
[3]  
JOHNSON WL, 1982, METASTABLE MATERIALS
[4]   ION MIXING AND PHASE-DIAGRAMS [J].
LAU, SS ;
LIU, BX ;
NICOLET, MA .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY) :97-105
[5]   STRUCTURAL DIFFERENCE RULE FOR AMORPHOUS ALLOY FORMATION BY ION MIXING [J].
LIU, BX ;
JOHNSON, WL ;
NICOLET, MA ;
LAU, SS .
APPLIED PHYSICS LETTERS, 1983, 42 (01) :45-47
[6]   CRYSTALLIZATION INVESTIGATION OF NISI2 THIN-FILMS [J].
MAENPAA, M ;
HUNG, LS ;
TSAUR, BY ;
MAYER, JW ;
NICOLET, MA ;
LAU, SS ;
SADANA, DK ;
TSENG, WF .
JOURNAL OF ELECTRONIC MATERIALS, 1982, 11 (02) :289-301
[7]   EPITAXIAL REORDERING OF ION-IRRADIATED NISI2 LAYERS [J].
MAENPAA, M ;
HUNG, LS ;
NICOLET, MA ;
SADANA, DK ;
LAU, SS .
THIN SOLID FILMS, 1982, 87 (03) :277-284
[8]   ION-BEAM-INDUCED REACTIONS IN METAL-SEMICONDUCTOR AND METAL-METAL THIN-FILM STRUCTURES [J].
MAYER, JW ;
TSAUR, BY ;
LAU, SS ;
HUNG, LS .
NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR) :1-13
[9]  
MAYER JW, 1983, SURFACE MODIFICATION, pCH9
[10]   PRODUCTION AND ANNEALING OF ION-BOMBARDMENT DAMAGE IN SILICIDES OF PT, PD, AND NI [J].
TSAUR, BY ;
ANDERSON, CH .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (02) :940-942
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