FORMATION PROCESS OF TANTALUM NITRIDE BY THE REACTION OF TANTALUM PENTACHLORIDE WITH AMMONIA IN THE VAPOR-PHASE AND PROPERTIES OF THE TANTALUM NITRIDE FORMED

被引：10
作者：
YAJIMA, A
MATSUZAKI, R
SAEKI, Y
机构：
来源：
DENKI KAGAKU | 1983年 / 51卷 / 08期
关键词：
D O I：
10.5796/kogyobutsurikagaku.51.676
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：676 / 680
页数：5
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