FORMATION PROCESS OF TANTALUM NITRIDE BY THE REACTION OF TANTALUM PENTACHLORIDE WITH AMMONIA IN THE VAPOR-PHASE AND PROPERTIES OF THE TANTALUM NITRIDE FORMED

被引：10

作者：

YAJIMA, A

MATSUZAKI, R

SAEKI, Y

机构：

来源：

DENKI KAGAKU | 1983年 / 51卷 / 08期

关键词：

D O I：

10.5796/kogyobutsurikagaku.51.676

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：676 / 680

页数：5

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