CONTROLLED SUBSTRATE TEMPERATURE APPARATUS

被引：1
|
作者：
UNTERKOFLER, GJ
机构：
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1966年 / 37卷 / 08期
关键词：
D O I：
10.1063/1.1720417
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：1082 / +
页数：1
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