EFFECTS OF OXYGEN-CONTENT ON THE OPTICAL-PROPERTIES OF TANTALUM OXIDE-FILMS DEPOSITED BY ION-BEAM SPUTTERING

被引：148
作者：
DEMIRYONT, H [1 ]
SITES, JR [1 ]
GEIB, K [1 ]
机构：
[1] COLORADO STATE UNIV,DEPT PHYS,FT COLLINS,CO 80523
来源：
APPLIED OPTICS | 1985年 / 24卷 / 04期
关键词：
D O I：
10.1364/AO.24.000490
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：490 / 495
页数：6
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