THERMAL DECOMPOSITION OF INDIUM PHOSPHIDE IN VACUUM AND ATOMIC HYDROGEN ENVIRONMENT

被引：0

作者：

Gorbenko, V. I. ^{[1
]}

Gorban, A. N. ^{[1
]}

机构：

[1] Class Private Univ, Zaporizhia, Ukraine

来源：

RADIO ELECTRONICS COMPUTER SCIENCE CONTROL | 2012年 / 1卷

关键词：

indium phosphide; atomic hydrogen; thermal decomposition; scanning electron microscopy;

D O I：

暂无

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

The thermal decomposition of indium phosphide has been investigated by Auger-electron spectroscopy and mass- spectroscopy. Scanning electron microscopy has been used for study of indium islands growth on surface of the compound semiconductor. The role of atomic hydrogen in processes of decomposition and growth of metallic islands was determined by comparing with these processes under vacuum.

引用

页码：7 / 10

页数：4

共 6 条

[1]

Gorbenko V., 1997, P 27 STAT OF THE ART, V9721, P375

[2] INTERACTION OF ATOMIC-HYDROGEN WITH CLEAVED INP .1. THE ADSORPTION STAGE [J].

MHAMEDI, O ;

PROIX, F ;

SEBENNE, CA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1988, 6 (02) :193-198

[3]

Panish M.B., 1970, J CHEM THERMODYN, V2, P299, DOI 10.1016/0021-9614(70)

[4] DISSOCIATION EFFECTS OF H AND H-2+ ON CLEAN III-V COMPOUNDS [J].

PROIX, F .

PHYSICA B, 1991, 170 (1-4) :457-468

[5] INTERACTION OF ATOMIC-HYDROGEN WITH CLEAVED INP .2. THE DECOMPOSITION STAGE [J].

PROIX, F ;

MHAMEDI, O ;

SEBENNE, CA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (02) :199-203

[6] ATOMIC-HYDROGEN - A LOCAL PROBE FOR INTERFACE CHARACTERIZATION [J].

SCHAEFER, JA .

SURFACE SCIENCE, 1987, 189 :127-136

← 1 →