SURFACE SENSITIVE ELECTRON-SPECTROSCOPY STUDY OF DIAMOND FILMS PREPARED BY HOT FILAMENT-ASSISTED CVD

被引:5
作者
CINTI, RC
MATHIS, BS
BONNOT, AM
机构
[1] Laboratoire d'Etudes des Propriétés Electroniques des Solides, CNRS, 38042 Grenoble Cedex 09
关键词
D O I
10.1016/0039-6028(92)90552-H
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Diamond films prepared by the use of a hot filament-assisted chemical vapor deposition have been investigated by Auger electron, electron energy loss and UV photoelectron spectroscopies. Results are discussed in comparison with previous measurements done principally on natural diamond and with graphite data. It is shown that film surfaces have original electron structure induced properties which can be explained in a simple model where perturbed diamond surfaces must be implicated.
引用
收藏
页码:265 / 271
页数:7
相关论文
共 16 条
[1]   EELS ANALYSIS OF VACUUM ARC-DEPOSITED DIAMOND-LIKE FILMS [J].
BERGER, SD ;
MCKENZIE, DR ;
MARTIN, PJ .
PHILOSOPHICAL MAGAZINE LETTERS, 1988, 57 (06) :285-290
[2]   RAMAN MICROSPECTROSCOPY OF DIAMOND CRYSTALS AND THIN-FILMS PREPARED BY HOT-FILAMENT-ASSISTED CHEMICAL VAPOR-DEPOSITION [J].
BONNOT, AM .
PHYSICAL REVIEW B, 1990, 41 (09) :6040-6049
[3]   SECONDARY-ELECTRON EMISSION AND ELECTRON-ENERGY-LOSS RESULTS ON GRAPHITE SINGLE-CRYSTALS [J].
CAPUTI, LS ;
CHIARELLO, G ;
SANTANIELLO, A ;
COLAVITA, E ;
PAPAGNO, L .
PHYSICAL REVIEW B, 1986, 34 (09) :6080-6084
[4]   ANGLE RESOLVED ELECTRON-ENERGY LOSS SPECTROSCOPY ON GRAPHITE [J].
DIEBOLD, U ;
PREISINGER, A ;
SCHATTSCHNEIDER, P ;
VARGA, P .
SURFACE SCIENCE, 1988, 197 (03) :430-443
[5]  
DILKS A, 1981, ELECTRON SPECTROSCOP, V4, P171
[6]   HIGH-RESOLUTION ELECTRON-ENERGY-LOSS SPECTROSCOPY OF THIN-FILMS OF C60 ON SI(100) [J].
GENSTERBLUM, G ;
PIREAUX, JJ ;
THIRY, PA ;
CAUDANO, R ;
VIGNERON, JP ;
LAMBIN, P ;
LUCAS, AA ;
KRATSCHMER, W .
PHYSICAL REVIEW LETTERS, 1991, 67 (16) :2171-2174
[7]   DIAMOND SURFACE .2. SECONDARY-ELECTRON EMISSION [J].
LURIE, PG ;
WILSON, JM .
SURFACE SCIENCE, 1977, 65 (02) :476-498
[8]   X-RAY PHOTOEMISSION STUDIES OF DIAMOND, GRAPHITE, AND GLASSY CARBON VALENCE BANDS [J].
MCFEELY, FR ;
KOWALCZYK, SP ;
LEY, L ;
CAVELL, RG ;
POLLAK, RA ;
SHIRLEY, DA .
PHYSICAL REVIEW B, 1974, 9 (12) :5268-5278
[9]  
MITSUDA Y, 1991, SURF SCI, V257, pL633
[10]   ELECTRON-SPECTROSCOPY OF ION-BEAM AND HYDROCARBON PLASMA GENERATED DIAMOND-LIKE CARBON-FILMS [J].
MORAVEC, TJ ;
ORENT, TW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (02) :226-228