CHARACTERIZATION OF A 3-CM KAUFMAN ION-SOURCE WITH NITROGEN FEED GAS

被引:48
作者
VANVECHTEN, D
HUBLER, GK
DONOVAN, EP
机构
关键词
D O I
10.1016/0042-207X(86)90123-5
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:841 / 845
页数:5
相关论文
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