MEASUREMENT OF NARROW SI DOPANT DISTRIBUTIONS IN GAAS BY SIMS

被引：57
作者：
CLEGG, JB
BEALL, RB
机构：
来源：
SURFACE AND INTERFACE ANALYSIS | 1989年 / 14卷 / 6-7期
关键词：
D O I：
10.1002/sia.740140607
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
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页码：307 / 314
页数：8
相关论文
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