SURFACE ANALYSIS OF INSULATING MATERIALS BY SECONDARY ION MASS-SPECTROMETRY (SIMS)

被引：31
|
作者：
MULLER, G [1 ]
机构：
[1] BAYER AG,D-4150 KREFELD,FED REP GER
来源：
APPLIED PHYSICS | 1976年 / 10卷 / 04期
关键词：
D O I：
10.1007/BF00920616
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：317 / 324
页数：8
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