SYNTHESIS AND TRIBOLOGICAL PROPERTIES OF CARBON NITRIDE AS A NOVEL SUPERHARD COATING AND SOLID LUBRICANT

被引：59
作者：
CHEN, MY
LIN, X
DRAVID, VP
CHUNG, YW
WONG, MS
SPROUL, WD
机构：
[1] Northwestern University, Evanston, IL
来源：
TRIBOLOGY TRANSACTIONS | 1993年 / 36卷 / 03期
关键词：
D O I：
10.1080/10402009308983188
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
This paper reports the discovery of a new crystalline thin-film material suitable for tribological applications. Carbon nitride thin films were synthesized using DC magnetron sputtering of a high-purity graphite target in an argon/nitrogen plasma using various substrates held at ambient temperatures. These thin films consist Of mixed amorphous and crystalline phases. Unlike previous work, a significant amount of nitrogen, the N/C ratio exceeding 0.4 in the bulk, was incorporated. Infra-red studies showed that nitrogen was bonded to carbon in the film. These films appeared to be very wear-resistant under lubricated sliding conditions. In dry sliding, carbon nitride gave friction coefficients as low as 0.16, comparable to diamond.
引用
收藏
页码：491 / 495
页数：5
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