SURFACE MODIFICATION WITH GAS CLUSTER ION-BEAMS

被引：91
|
作者：
YAMADA, I
BROWN, WL
NORHBY, JA
SOSNOWSKI, M
机构：
[1] ATT BELL LABS,MURRAY HILL,NJ 07947
[2] UNIV RHODE ISL,KINGSTON,RI 02881
[3] NEW JERSEY INST TECHNOL,NEWARK,NJ 07102
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 79卷 / 1-4期
关键词：
D O I：
10.1016/0168-583X(93)95330-8
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A review of recent data on surface modification with beams of gas cluster ions is given. Damage, implantation, and surface erosion with 5-30 kV cluster ions of Ar and CO2 are discussed in the context of earlier results obtained at higher energies. It is concluded that gas cluster ion beams may find new interesting applications for very shallow implantation, amorphization and surface smoothing.
引用
收藏
页码：223 / 226
页数：4
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