SPUTTER DEPOSITION OF PLATINUM FILMS IN ARGON OXYGEN AND NEON OXYGEN DISCHARGES

被引：29
作者：
AITA, CR
TRAN, NC
机构：
[1] UNIV WISCONSIN,SURFACE STUDIES LAB,MILWAUKEE,WI 53201
[2] UNIV WISCONSIN,CTR MAT SCI,MADISON,WI 53706
来源：
JOURNAL OF APPLIED PHYSICS | 1984年 / 56卷 / 04期
关键词：
D O I：
10.1063/1.334035
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：958 / 963
页数：6
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