LIGHT-SCATTERING FROM SOL-GEL PROCESSED LEAD-ZIRCONATE-TITANATE THIN-FILMS

被引:1
作者
SINCLAIR, MB
DIMOS, D
POTTER, BG
SCHWARTZ, RW
机构
[1] Sandia National Laboratories, Albuquerque
关键词
D O I
10.1080/10584589508220235
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The results of light scattering measurements on a series of five Pb(Zr0.4Ti0.6)O-3 thin films prepared by a sol-gel method are presented. The films differed due to the addition of different amounts of the chelating agent acetylacetone to the precursor solution immediately before spin coating. Two types of light scattering measurements were performed: angularly resolved light scattering and spectrally resolved light scattering. While the angularly resolved light scattering measurements indicated only small differences between the films, the spectrally resolved measurements revealed a trend of decreasing light scattering with increasing acetylacetone concentration. This apparent contradiction is resolved by a careful analysis of the theoretical aspects of thin-film light scattering. The advantages of performing spectrally resolved light scattering measurements when assessing the optical quality of thin films is stressed.
引用
收藏
页码:225 / 236
页数:12
相关论文
共 20 条
[1]   FROM LIGHT-SCATTERING TO THE MICROSTRUCTURE OF THIN-FILM MULTILAYERS [J].
AMRA, C .
APPLIED OPTICS, 1993, 32 (28) :5481-5491
[2]   COMPARISON OF SURFACE AND BULK SCATTERING IN OPTICAL MULTILAYERS [J].
AMRA, C ;
GREZESBESSET, C ;
BRUEL, L .
APPLIED OPTICS, 1993, 32 (28) :5492-5503
[3]   1ST-ORDER VECTOR THEORY OF BULK SCATTERING IN OPTICAL MULTILAYERS [J].
AMRA, C .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1993, 10 (02) :365-374
[4]   H-1 AND C-13 NMR INVESTIGATIONS OF PB(ZR,TI)O3 THIN-FILM PRECURSOR SOLUTIONS [J].
ASSINK, RA ;
SCHWARTZ, RW .
CHEMISTRY OF MATERIALS, 1993, 5 (04) :511-517
[5]  
DIMOS D, 1993, MATER RES SOC S P, V310, P87
[6]   RELATION BETWEEN LIGHT-SCATTERING AND THE MICROSTRUCTURE OF OPTICAL THIN-FILMS [J].
DUPARRE, A ;
KASSAM, S .
APPLIED OPTICS, 1993, 32 (28) :5475-5480
[7]   THEORY OF LIGHT-SCATTERING FROM A ROUGH-SURFACE WITH AN INHOMOGENEOUS DIELECTRIC PERMITTIVITY [J].
ELSON, JM .
PHYSICAL REVIEW B, 1984, 30 (10) :5460-5480
[8]   LIGHT-SCATTERING FROM MULTILAYER OPTICS - COMPARISON OF THEORY AND EXPERIMENT [J].
ELSON, JM ;
RAHN, JP ;
BENNETT, JM .
APPLIED OPTICS, 1980, 19 (05) :669-679
[9]   RELATION BETWEEN THE ANGULAR-DEPENDENCE OF SCATTERING AND THE STATISTICAL PROPERTIES OF OPTICAL-SURFACES [J].
ELSON, JM ;
BENNETT, JM .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1979, 69 (01) :31-47
[10]   IR LIGHT-SCATTERING FROM SURFACES COVERED WITH MULTIPLE DIELECTRIC OVERLAYERS [J].
ELSON, JM .
APPLIED OPTICS, 1977, 16 (11) :2872-2881