共 9 条
[2]
Gaskill J. D., 1978, LINEAR SYSTEMS FOURI
[3]
Goodman J. W, 2005, INTRO FOURIER OPTICS
[4]
LAYCOCK LC, 1983, GEC J RES, V1
[6]
VANDERLUGT A, 1964, IEEE T INFORM THEORY, V10, P139
[7]
APPLICATION OF SPATIAL FILTERING SUBTRACTION TO THIN-FILM AND INTEGRATED-CIRCUIT MASK INSPECTION
[J].
APPLIED OPTICS,
1973, 12 (08)
:1880-1884
[9]
YU FTS, 1982, P SOC PHOTO-OPT INST, V360, P310