CHEMICAL VAPOR-DEPOSITION OF TRANSPARENT ELECTRICALLY CONDUCTING LAYERS OF INDIUM OXIDE DOPED WITH TIN

被引：134
作者：
KANE, J
SCHWEIZER, HP
KERN, W
机构：
[1] RCA LABS LTD, ZURICH, SWITZERLAND
[2] RCA LABS, PRINCETON, NJ USA
来源：
THIN SOLID FILMS | 1975年 / 29卷 / 01期
关键词：
D O I：
10.1016/0040-6090(75)90224-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：155 / 163
页数：9
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