KINETICS OF NITRIDE FORMATION ON TITANIUM TARGETS DURING REACTIVE SPUTTERING

被引：115
作者：
SUNDGREN, JE
JOHANSSON, BO
KARLSSON, SE
机构：
来源：
SURFACE SCIENCE | 1983年 / 128卷 / 2-3期
关键词：
D O I：
10.1016/S0039-6028(83)80031-4
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：265 / 280
页数：16
相关论文
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