TRANSPORT AND RE-DEPOSITION OF LIMITER-RELEASED METAL IMPURITIES

被引:21
作者
CLAASEN, HA
REPP, H
机构
关键词
D O I
10.1088/0029-5515/23/5/003
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
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页码:597 / 607
页数:11
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