共 737 条
Unconventional methods for forming nanopatterns
被引:27
作者:
Stewart, M. E.
[1
]
Motala, M. J.
[1
]
Yao, Jimin
[2
]
Thompson, L. B.
[1
]
Nuzzo, R. G.
[1
,2
]
机构:
[1] Univ Illinois, Dept Chem, Urbana, IL USA
[2] Univ Illinois, Dept Mat Sci & Engn, Urbana, IL USA
来源:
基金:
美国国家科学基金会;
关键词:
soft-;
imprint-;
near-field-;
and scanning probe lithography;
self assembly;
D O I:
10.1243/17403499JNN103
中图分类号:
TB3 [工程材料学];
学科分类号:
0805 ;
080502 ;
摘要:
Nanostructured materials have become an increasingly important theme in research, in no small part due to the potential impacts this science holds for applications in technology, including such notable areas as sensors, medicine, and high-performance integrated circuits. Conventional methods, such as the top-down approaches of projection lithography and scanning beam lithography, have been the primary means for patterning materials at the nanoscale. This article provides an overview of unconventional methods - both top-down and bottom-up approaches - for generating nanoscale patterns in a variety of materials, including methods that can be applied to fragile molecular systems that are difficult to pattern using conventional lithographic techniques. The promise, recent progress, advantages, limitations, and challenges to future development associated with each of these unconventional lithographic techniques will be discussed with consideration given to their potential for use in large-scale manufacturing.
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页码:81 / 138
页数:58
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