THE EFFECT OF ZN ON INP SURFACES DURING DIFFUSION

被引：14
作者：
EGER, D
SPRINGTHORPE, AJ
MARGITTAI, A
SHEPHERD, FR
BRUCE, RA
SMITH, GM
机构：
[1] BNR, Ottawa, Ont, Can, BNR, Ottawa, Ont, Can
来源：
JOURNAL OF ELECTRONIC MATERIALS | 1987年 / 16卷 / 03期
关键词：
D O I：
10.1007/BF02655481
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
10
引用
收藏
页码：163 / 167
页数：5
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