ION-BEAM CRYSTALLOGRAPHY OF METAL SILICON INTERFACES - PD-SI(111)

被引:43
作者
TROMP, R
VANLOENEN, EJ
IWAMI, M
SMEENK, R
SARIS, FW
机构
关键词
D O I
10.1016/0040-6090(82)90100-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:151 / 159
页数:9
相关论文
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[4]  
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