PROXIMITY EFFECT CORRECTION CALCULATIONS BY THE INTEGRAL-EQUATION APPROXIMATE SOLUTION METHOD

被引：47
作者：
PAVKOVICH, JM
机构：
[1] Varian Associates, Palo Alto, CA,, USA, Varian Associates, Palo Alto, CA, USA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 01期
关键词：
D O I：
10.1116/1.583369
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
6
引用
收藏
页码：159 / 163
页数：5
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