共 28 条
- [11] KELLY BT, 1981, PHYSICS GRAPHITE
- [12] KOPPENDORFER W, 1988, 15TH S FUS TECHN UTR
- [14] MAYERHOFER U, 1986, THESIS TECHNICAL U M
- [16] SPUTTERING - REVIEW OF SOME RECENT EXPERIMENTAL AND THEORETICAL ASPECTS [J]. APPLIED PHYSICS, 1975, 8 (03): : 185 - 198
- [18] PHILLIPS V, 1982, J NUCL MATER, V112
- [19] POST D, 1988, 12TH INT C PLASM PHY