ANALYSIS OF THERMAL STRESS-INDUCED GRAIN-BOUNDARY CAVITATION AND NOTCHING IN NARROW AL-SI METALLIZATIONS

被引：49
作者：
LI, CY
BLACK, RD
LAFONTAINE, WR
机构：
来源：
APPLIED PHYSICS LETTERS | 1988年 / 53卷 / 01期
关键词：
D O I：
10.1063/1.100113
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：31 / 33
页数：3
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