GROWTH-PROCESS IN ATOMIC LAYER EPITAXY OF ZN CHALCOGENIDE SINGLE CRYSTALLINE FILMS ON (100) GAAS

被引:156
作者
YAO, T
TAKEDA, T
机构
关键词
D O I
10.1063/1.96930
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:160 / 162
页数:3
相关论文
共 6 条
[1]   ADSORPTION OF ZN ON GAAS [J].
ARTHUR, JR .
SURFACE SCIENCE, 1973, 38 (02) :394-412
[3]  
HONEN MA, 1980, THIN SOLID FILMS, V65, P301
[4]  
SUNTOLA T, 1984, 16TH C SOL STAT DEV, P647
[5]  
TANINEN VP, 1982, THIN SOLID FILMS, V90, P339
[6]  
YAO T, 1976, JPN J APPL PHYS, V16, P1001