EQUILIBRATION KINETICS IN INTERSTITIALLY DOPED A-SI-H

被引：0

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作者：

WINER, K

STREET, RA

机构：

来源：

AMORPHOUS SILICON TECHNOLOGY - 1989 | 1989年 / 149卷

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D O I：

10.1557/PROC-149-137

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

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页码：137 / 141

页数：5

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