KRF EXCIMER LASER LITHOGRAPHY FOR HALF-MICRON DEVICES

被引：0
|
作者：
OGAWA, K [1 ]
SASAGO, M [1 ]
ENDO, M [1 ]
NAKAGAWA, H [1 ]
ISHIHARA, T [1 ]
机构：
[1] MATSUSHITA ELECT IND CO LTD, SEMICOND RES CTR, MORIGUCHI, OSAKA 570, JAPAN
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 8B期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C432 / C432
页数：1
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