LIMITED PENETRATION E-BEAM LITHOGRAPHY

被引：0
|
作者：
MACDONALD, SA [1 ]
PEDERSON, LA [1 ]
PATLACH, AM [1 ]
WILLSON, CG [1 ]
机构：
[1] IBM CORP,ALMADEN RES CTR,SAN JOSE,CA 95120
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1986年 / 192卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：156 / PMSE
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