LIMITED PENETRATION E-BEAM LITHOGRAPHY

被引：0

作者：

MACDONALD, SA ^{[1
]}

PEDERSON, LA ^{[1
]}

PATLACH, AM ^{[1
]}

WILLSON, CG ^{[1
]}

机构：

[1] IBM CORP,ALMADEN RES CTR,SAN JOSE,CA 95120

来源：

ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1986年 / 192卷

关键词：

D O I：

暂无

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：156 / PMSE

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