DENSITY OF AMORPHOUS SILICON FILMS

被引：34

作者：

RENNER, O ^{[1
]}

ZEMEK, J ^{[1
]}

机构：

[1] CZECHOSLOVAK ACAD SCI, INST SOLID STATE PHYS, CUKROVARNICKA 10, 162 53 PRAGUE 6, CZECHOSLOVAKIA

来源：

关键词：

D O I：

10.1007/BF01591210

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：1273 / 1276

页数：4

共 16 条

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[9] EVIDENCE OF VOIDS WITHIN AS-DEPOSITED STRUCTURE OF GLASSY SILICON
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GRACZYK, JF
[J]. PHYSICAL REVIEW LETTERS, 1969, 23 (20) : 1167 - &
[10] MOSS SC, 1970, 10TH P INT C PHYS SE, P658