CHARACTERIZATION OF POLYAMIC ACID POLYIMIDE FILMS IN THE NANOMETRIC THICKNESS RANGE FROM SPIN-DEPOSITED POLYAMIC ACID

被引：72
作者：
RUSSAT, J
机构：
[1] IBM, Corbeil-Essonnes, Fr, IBM, Corbeil-Essonnes, Fr
来源：
SURFACE AND INTERFACE ANALYSIS | 1988年 / 11卷 / 08期
关键词：
D O I：
10.1002/sia.740110803
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
40
引用
收藏
页码：414 / 420
页数：7
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