DETERMINATION OF THE VELOCITY DISTRIBUTION OF SPUTTERED ATOMIC OXYGEN BY LASER-INDUCED FLUORESCENCE IN THE VACUUM-ULTRAVIOLET (130 NM)

被引：6
作者：
GOEHLICH, A
ROWEKAMP, M
DOBELE, HF
机构：
[1] Institut für Laser- und Plasmaphysik, Universität-GH Essen
来源：
SURFACE SCIENCE | 1991年 / 248卷 / 1-2期
关键词：
D O I：
10.1016/0039-6028(91)90080-C
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Ground state atomic oxygen sputtered from Ta2O5 targets is diagnosed by laser-induced fluorescence with VUV pump radiation. The radiation around 130 nm is generated by high-order anti-Stokes Raman scattering in hydrogen. Velocity distributions of sputtered particles are obtained by tuning the narrow-bandwidth VUV radiation over the Doppler profile of the moving sputtered O atoms. Absolute concentrations are determined by calibration with Rayleigh scattering.
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页码：271 / 275
页数：5
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