INTERACTIONS OF LOW-ENERGY REACTIVE IONS WITH SURFACES .4. CHEMICALLY BONDED DIAMOND-LIKE FILMS FROM ION-BEAM DEPOSITION

被引：97
|
作者：
KASI, SR
KANG, H
RABALAIS, JW
机构：
来源：
JOURNAL OF CHEMICAL PHYSICS | 1988年 / 88卷 / 09期
关键词：
D O I：
10.1063/1.454524
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
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页码：5914 / 5924
页数：11
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