PREPARATION OF FINE NI PARTICLES BY THE SPRAY-PYROLYSIS TECHNIQUE AND THEIR FILM FORMING PROPERTIES IN THE THICK-FILM METHOD

Fine Ni particles were directly prepared from Ni(N03)2and NiCl2 aqueous solutions by the spray-pyrolysis technique under an H2-N2atmosphere. Hollow Ni particles with rough surfaces were obtained at a low reaction temperature (700–900 °C). With increasing reaction temperatures from 900 °C to 1500 °C, the particles varied gradually to solid ones with a smooth surface, and the particles obtained at 1600 °C were perfectly spherical ones whose average size was —0.6 μm. From the point of view that aggregation free powders are considered to be good for thick film applications, Ni(N03)2was preferred to NiCl2as a starting material. The perfectly spherical particles derived from Ni(N03)2gave a Ni film about 3 μm in thickness having sheet resistance of 37.7 mΩ square-1. © 1990, Materials Research Society. All rights reserved.