PLASMA-HYDROGENATION EFFECTS AND THE THICKNESS DEPENDENCE OF ELECTRICAL-PROPERTIES AND ELECTRON-SPIN-RESONANCE IN UNDOPED CVD A-SI

被引：17

作者：

HASEGAWA, S

ANDO, D

KURATA, Y

SHIMIZU, T

机构：

来源：

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1983年 / 47卷 / 02期

关键词：

D O I：

10.1080/13642812.1983.9728426

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：139 / 149

页数：11

共 12 条

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