Research on VOx uncooled infrared bolometer based on porous silicon

被引：0
|
作者：
Wang, Bin [1 ,2 ]
Lai, Jianjun [1 ,2 ]
Zhao, Erjing [1 ]
Hu, Haoming [1 ]
Chen, Sihai [1 ,2 ]
机构：
[1] Huazhong Univ Sci & Technol, Sch Optoelect Sci & Engn, Wuhan 430074, Hubei, Peoples R China
[2] Wuhan Natl Lab Optoelect, Wuhan 430074, Hubei, Peoples R China
来源：
FRONTIERS OF OPTOELECTRONICS | 2012年 / 5卷 / 03期
基金：
中国国家自然科学基金;
关键词：
infrared (IR); porous silicon; microbolometer; micromachining;
D O I：
10.1007/s12200-012-0224-7
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, vanadium oxide thin film of TCR of -3.5%/K has been deposited by pulsed DC magnetron sputtering method. The property of this VOx has been investigated by X-ray diffractometer (XRD) and atomic force microscopy (AFM) in detail. XRD test indicates that this film is composed of V2O3, V3O5 and VO2. VOx microbolometer with infrared (IR) absorbing structure is fabricated based on porous silicon sacrificial layer technology. Optimized micro-bridge structure is designed and carried out to decrease thermal conductance and this structure shows good compatibility with micromachining technology. This kind of bolometer with 74% IR absorption of 8-14 ae m, has maximum detectivity of 1.09 x 109 cm$ Hz(1/2)/W at 24 Hz frequency and 9.8 mu A bias current.
引用
收藏
页码：292 / 297
页数：6
相关论文
共 50 条
  • [1] Research on VOx uncooled infrared bolometer based on porous silicon
    Bin Wang
    Jianjun Lai
    Erjing Zhao
    Haoming Hu
    Sihai Chen
    Frontiers of Optoelectronics, 2012, 5 (3) : 292 - 297
  • [2] MEMS-Based uncooled infrared bolometer Arrays - A review
    Niklaus, Frank
    Vieider, Christian
    Jakobsen, Henrik
    MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III, 2008, 6836
  • [3] Integrated micro Pirani gauge based hermetical package monitoring for uncooled VOx bolometer FPAs
    Bin Xiao
    Tao Dong
    Einar Halvorsen
    Zhaochu Yang
    Yulong Zhang
    Nils Hoivik
    Dandan Gu
    Nhut Minh Tran
    Henrik Jakobsen
    Microsystem Technologies, 2011, 17 : 115 - 125
  • [4] Uncooled VOx Infrared Sensor Development and Application
    Li, Chuan
    Skidmore, George D.
    Han, C. J.
    INFRARED TECHNOLOGY AND APPLICATIONS XXXVII, 2011, 8012
  • [5] Design of a micro uncooled infrared imaging system based on VOx IRFPA
    Xie, Dingchao
    Song, Yong
    Song, Youchun
    Wu, Qiang
    Liang, Beiyan
    Yang, Yue
    ADVANCED SENSOR SYSTEMS AND APPLICATIONS VII, 2016, 10025
  • [6] Uncooled Microbolometer Based on VOx Film for Infrared and Millimeter-Wave Radiation
    Oleynik A.S.
    Medvedev M.A.
    Turkin Y.V.
    Nanotechnologies in Russia, 2017, 12 (9-10): : 520 - 528
  • [7] Infrared responsivity of uncooled VO2-based thin films bolometer
    Chen, C.H.
    Yi, X.J.
    Xiong, B.F.
    Wuli Xuebao/Acta Physica Sinica, 2001, 50 (03):
  • [8] An approach for the performance analysis of an uncooled infrared bolometer imager
    Tsujino, Yoshiki
    INFRARED PHYSICS & TECHNOLOGY, 2010, 53 (01) : 50 - 60
  • [9] Boron-doped nanocrystalline silicon germanium thin films for uncooled infrared bolometer applications
    Xu, Rui
    Li, Wei
    He, Jian
    Sun, Yan
    Jiang, Ya-Dong
    INFRARED PHYSICS & TECHNOLOGY, 2013, 58 : 32 - 35
  • [10] Uncooled infrared bolometer arrays with α-Si and metal films
    Liu, Huan
    Wang, Shanshan
    Cai, Changlong
    Zhou, Shun
    OPTOELECTRONIC MATERIALS, PTS 1AND 2, 2010, 663-665 : 421 - +
12345