OPTICAL-PROPERTIES OF EXTREMELY HEAVILY DOPED SI OBTAINED BY ION-IMPLANTATION AND LASER ANNEALING

被引：0
|
作者：
MOTOOKA, T [1 ]
MIYAO, M [1 ]
TOKUYAMA, T [1 ]
机构：
[1] HITACHI LTD, CENT RES LAB, KOKUBUNJI, TOKYO 185, JAPAN
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1982年 / 129卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C103 / C103
页数：1
相关论文
共 50 条
  • [1] SUBSTITUTIONAL DISORDER EFFECTS ON OPTICAL-SPECTRA OF EXTREMELY HEAVILY DOPED SI-P OBTAINED BY ION-IMPLANTATION AND LASER ANNEALING
    MOTOOKA, T
    UDA, T
    MIYAO, M
    SOLID STATE COMMUNICATIONS, 1984, 50 (01) : 79 - 81
  • [2] CHANGE OF THE ELECTRON EFFECTIVE MASS IN EXTREMELY HEAVILY DOPED NORMAL-TYPE SI OBTAINED BY ION-IMPLANTATION AND LASER ANNEALING
    MIYAO, M
    MOTOOKA, T
    NATSUAKI, N
    TOKUYAMA, T
    SOLID STATE COMMUNICATIONS, 1981, 37 (07) : 605 - 608
  • [3] OPTICAL-PROPERTIES OF SI PARTIALLY AMORPHIZED BY ION-IMPLANTATION
    ADACHI, S
    AOKI, T
    JOURNAL OF APPLIED PHYSICS, 1992, 71 (07) : 3313 - 3319
  • [4] OPTICAL-PROPERTIES OF LASER-INDUCED HEAVILY DOPED SI
    RAVINDRA, NM
    MHORONGE, JF
    JOUANNE, M
    INFRARED PHYSICS, 1985, 25 (05): : 707 - 714
  • [5] INFLUENCE OF ION-IMPLANTATION ON THE OPTICAL-PROPERTIES OF SILICON
    WESCH, W
    GOTZ, G
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 49 (1-3): : 137 - 140
  • [6] ION-IMPLANTATION AND LASER ANNEALING
    SORENSEN, G
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 186 (1-2): : 189 - 192
  • [7] MODIFICATION OF THE OPTICAL-PROPERTIES OF GLASS BY SEQUENTIAL ION-IMPLANTATION
    MAGRUDER, RH
    ZUHR, RA
    OSBORNE, DH
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 99 (1-4): : 590 - 593
  • [8] LASER ANNEALING, ION-IMPLANTATION, EPITAXY
    SARASWAT, KC
    SOLID STATE TECHNOLOGY, 1979, 22 (11) : 57 - 57
  • [9] SUBGAP OPTICAL-PROPERTIES OF AMORPHOUS INP PRODUCED BY ION-IMPLANTATION
    WENDLER, E
    MULLER, P
    BACHMANN, T
    WESCH, W
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1994, 176 (01) : 85 - 90
  • [10] OPTICAL-PROPERTIES OF THERMALLY STABILIZED ION-IMPLANTATION AMORPHIZED SILICON
    FRIED, M
    LOHNER, T
    JAROLI, E
    VIZKELETHY, G
    KOTAI, E
    GYULAI, J
    BIRO, A
    ADAM, J
    SOMOGYI, M
    KERKOW, H
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 : 577 - 581
12345